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DN Solutions: New DNC Series for the Semiconductor Industry

DN Solutions announces the launch of its new DNC series (DNC 8050, DNC 8060). DNC stands for DN Solutions Ceramic and represents the new manufacturing machine series specifically developed for ceramic processing.

The new machine models are specifically designed for the production of wear components such as focus rings used in the semiconductor wafer process. These components operate in chambers exposed to high temperatures and chemical stress. Therefore, they are made from materials such as quartz, ceramics, and silicon carbide (SiC), which are considered extremely difficult-to-machine materials. The DNC series enables precise grinding of these hard-to-machine materials.

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Precision Machining of Quartz and Ceramics

Quartz is harder than carbon-based steel, but at the same time brittle and prone to breakage, making it difficult to machine with conventional tools. Even with the use of costly diamond tools, microcracks and fractures often occur. Additionally, quartz is sensitive to contamination, requiring the utmost cleanliness during machining.

For the DNC series, DN Solutions has developed a high-performance grinding spindle that achieves 10,000 rotations per minute at 7.5 kilowatts of power. Thanks to its combination of power and precision, the spindle is perfectly suited for demanding materials such as quartz and ceramics.

The monolithic, high-rigidity machine bed and the precise feed axis guides help suppress vibrations and minimize thermal changes even during extended operation. While conventional machines lose precision due to spindle drift, the DNC series impresses with long-term dimensional accuracy and structural stability, which positively impacts the machine's service life.

Clean Solutions for Quartz Dust and Dresser Challenges

Fine quartz dust (grinding sludge) generated during processing can lead to machine failures. To prevent this, DN Solutions uses a fully enclosed sliding cover that shields the inclined bed surface and prevents coolant and dust from entering the machine interior. Maintenance is simplified by the easily removable coolant tank, which allows for effortless sludge removal.

The DNC series also features an internal spindle for automatic tool dressing. This is necessary because, during grinding, the surface of the grinding wheel inevitably becomes clogged with chips, requiring periodic dressing to maintain shape and

restore cutting performance. Traditional systems typically need to interrupt operations for this. The DNC series is now designed to perform this process automatically and integratively.

The series also combines the multifunctionality of a machining center (milling) with the capabilities of a turning center (lathe), enabling inner and outer diameter machining, drilling, and contouring in a single setup. The equipment includes an automatic tool changer (ATC), an automatic tool measurement system, and an automatic workpiece measurement system, enabling fully automated operation, reducing operator workload, and increasing productivity.