Fraunhofer is Working on A PFAS-Free Alternative for Etching Processes

Manufacturing Research Fraunhofer is Working on A PFAS-Free Alternative for Etching Processes

2026-02-23 Source: Press release | Translated by AI 1 min Reading Time

Related Vendors

tmts2026-ticec-banner-en-2000px (https://www.tmts.tw/en)

Taiwan Machine Tool & Accessory Builders' Association (TMBA)

Researchers at Fraunhofer ENAS are working on a new silicon structuring process that avoids fluorinated "forever chemicals." By curbing PFAS-containing process chemicals, the aim is to reduce environmental impacts in chip manufacturing.

Change in direction: The shift away from PFAS in semiconductor manufacturing and the move toward sustainable chip production is demonstrated by the trilateral collaboration between Fraunhofer ENAS, the Paul Scherrer Institute PSI, and Memsstar Limited, which rely on the environmentally friendly Gas-MacEtch technology.(Image: andreyarmyagov/Canva) — Change in direction: The shift away from PFAS in semiconductor manufacturing and the move toward sustainable chip production is demonstrated by the trilateral collaboration between Fraunhofer ENAS, the Paul Scherrer Institute PSI, and Memsstar Limited, which rely on the environmentally friendly Gas-MacEtch technology.
(Image: andreyarmyagov/Canva)

The Fraunhofer Institute for Electronic Nano Systems ENAS, together with the Paul Scherrer Institute (PSI) and the company Memsstar, is working on an alternative to PFAS-containing process chemicals in semiconductor manufacturing. The focus is on an innovative etching process for the micro- and nanotechnological processing of silicon, based on the so-called Gas-MacEtch technology. The use of environmentally friendly and biodegradable chemicals aims to significantly reduce the ecological impact during wafer structuring.

In addition to substituting fluorinated substances, the approach also addresses the energy consumption of manufacturing: According to the researchers, the process enables structuring at lower temperatures than established methods, reducing energy demand, greenhouse gas emissions, and production operating costs.

PFAS are considered indispensable in many industries due to their chemical stability and heat resistance, fulfilling central functions. At the same time, these substances are coming under increasing regulatory pressure because of their persistence and potential health risks. Against this backdrop, the development of alternative process chemistries for the semiconductor industry is gaining importance. Through this project, the partners aim to lay a foundation for transferring more sustainable manufacturing technologies into industrial practice and better meeting future environmental requirements.

What Does This Mean for the Industry?

PFAS are considered technically difficult to replace in many manufacturing steps, such as etching processes, sealing materials, or coatings, because they offer a combination of chemical stability, temperature resistance, and process reliability. The Fraunhofer consortium's approach thus addresses a key tension in the industry: the need to meet environmental requirements without compromising production capability.

Whether new processes achieve industrial relevance depends less on their fundamental functionality and more on criteria such as scalability, process integration, cost, and long-term stability. In practice, alternatives must not only replace individual applications but also be compatible with existing production lines. (sb)

Subscribe to the newsletter now

Don't Miss out on Our Best Content

Business E-mail

Please enter a valid mailadress.

By clicking on „Subscribe to Newsletter“ I agree to the processing and use of my data according to the consent form (please expand for details) and accept the Terms of Use. For more information, please see our Privacy Policy. The consent declaration relates, among other things, to the sending of editorial newsletters by email and to data matching for marketing purposes with selected advertising partners (e.g., LinkedIn, Google, Meta)

Date: 08.12.2025

Naturally, we always handle your personal data responsibly. Any personal data we receive from you is processed in accordance with applicable data protection legislation. For detailed information please see our privacy policy.

Consent to the use of data for promotional purposes

I hereby consent to Vogel Communications Group GmbH & Co. KG, Max-Planck-Str. 7-9, 97082 Würzburg including any affiliated companies according to §§ 15 et seq. AktG (hereafter: Vogel Communications Group) using my e-mail address to send editorial newsletters. A list of all affiliated companies can be found here

Newsletter content may include all products and services of any companies mentioned above, including for example specialist journals and books, events and fairs as well as event-related products and services, print and digital media offers and services such as additional (editorial) newsletters, raffles, lead campaigns, market research both online and offline, specialist webportals and e-learning offers. In case my personal telephone number has also been collected, it may be used for offers of aforementioned products, for services of the companies mentioned above, and market research purposes.

Additionally, my consent also includes the processing of my email address and telephone number for data matching for marketing purposes with select advertising partners such as LinkedIn, Google, and Meta. For this, Vogel Communications Group may transmit said data in hashed form to the advertising partners who then use said data to determine whether I am also a member of the mentioned advertising partner portals. Vogel Communications Group uses this feature for the purposes of re-targeting (up-selling, cross-selling, and customer loyalty), generating so-called look-alike audiences for acquisition of new customers, and as basis for exclusion for on-going advertising campaigns. Further information can be found in section “data matching for marketing purposes”.

In case I access protected data on Internet portals of Vogel Communications Group including any affiliated companies according to §§ 15 et seq. AktG, I need to provide further data in order to register for the access to such content. In return for this free access to editorial content, my data may be used in accordance with this consent for the purposes stated here. This does not apply to data matching for marketing purposes.

Right of revocation

I understand that I can revoke my consent at will. My revocation does not change the lawfulness of data processing that was conducted based on my consent leading up to my revocation. One option to declare my revocation is to use the contact form found at https://contact.vogel.de. In case I no longer wish to receive certain newsletters, I have subscribed to, I can also click on the unsubscribe link included at the end of a newsletter. Further information regarding my right of revocation and the implementation of it as well as the consequences of my revocation can be found in the data protection declaration, section editorial newsletter.