Drive technology and pneumatics Drive technology for wafer processing and inspection
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Drive technology and pneumatics: We present to you four new solutions for wafer processing.
Precise proportional valve island with piezo pneumatics
There are exciting novelties for the electronics and semiconductor industry, for example from Festo. The specialist for industrial automation has launched the proportional valve island VTEP. The compressed air technology used by the company is called: Controlled Pneumatics. It provides sensitive pressure regulation down to below 1 mbar for the compact valve island. This makes it well-suited for applications such as wafer polishing or patch clamp applications in life science. Moreover, the technology with piezo valves reduces the consumption of compressed air by up to 50 percent.
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