Electromechanical Sensors Quantum Sensors for Atomic Force Microscopes Are Integrated in the Chip

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Compact instead of complex: Researchers at TU Wien have developed a capacitor with an electrode gap of just 32 nanometers that can be fully integrated into chips. This allows complex optical measuring systems to be replaced by electrical oscillating circuits.

Sensor technology is on the verge of a significant turning point: researchers at TU Wien have succeeded in developing a plate capacitor with a world record electrode gap of just 32 nm. This would be more than a significant miniaturization. This paves the way for a new generation of high-precision sensors that do not require complex optical components and achieve measurement accuracies that are only limited by the laws of quantum physics.

The paradigmatic approach of the research team led by Daniel Platz and Prof. Ulrich Schmid from the Institute of Sensor and Actuator Systems is particularly interesting for enticklers. Instead of relying on proven but complex optomechanical systems, the scientists use electrical oscillating circuits to evaluate mechanical vibrations. "Together with an electrode, our aluminum membrane forms a tiny capacitor. In combination with a coil, an oscillating circuit is created whose resonance reacts very sensitively to any change in the mechanical vibration," says Platz, explaining the functional principle.

Advantages for Atomic Force Microscopy

Thanks to the technology, considerable advantages are possible in practice: while conventional optomechanical experiments require complex, interference-prone optical setups that are difficult to integrate into compact systems, the electromechanical approach enables significantly more robust and miniaturizable applications. This opens up new potential, particularly for atomic force microscopy, where optical components have previously been used to read out the vibrations of a measuring tip. "We are replacing optical measurements with the measurement of the electrical oscillating circuit without any bulky optical components," emphasizes Ioan Ignat, one of the doctoral students involved.

The team achieved a further breakthrough with purely mechanical resonator structures that can be fully integrated into chips. "From the point of view of quantum theory, it doesn't matter whether you work with electromagnetic oscillations or mechanical vibrations. From a mathematical point of view, both can be described in the same way," explains MinHee Kwon, who is also working on her dissertation on the project.

Industrial Applications at Room Temperature

The fact that the developed structures work at room temperature is particularly important for industrial applications. While previous quantum sensor experiments often require cooling to temperatures close to absolute zero, the new development enables quantum effects under normal operating conditions. "Even at room temperature, the oscillations of a purely micromechanical system can be coupled with each other over a GHz frequency range without thermal noise masking the effects of the coupling," says Platz.

The research results show the potential for a new class of sensors that could be used both in precision measurement technology and in industrial applications. The combination of extreme miniaturization, the absence of optical components and room temperature operation makes this technology a promising alternative to existing solutions for electronics developers. "Our results make us extremely optimistic for the future," summarizes Daniel Platz. "We have now been able to show that our nanostructures have important properties that are needed to produce a new, reliable, high-precision generation of quantum sensors." (heh)

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