3D sensors from Micro-Epsilon for inspecting surfaces

Surface inspection Sensors for 3D surface inspection and defect detection

2025-03-24 From from Micro-Epsilon | Translated by AI 2 min Reading Time

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Micro-Epsilon has developed 3D sensors to inspect highly reflective and transparent surfaces and detect defects.

According to the manufacturer, the sensors enable full-area measurement using phase-measuring deflectometry.(Image: Micro-Epsilon measurement technology) — According to the manufacturer, the sensors enable full-area measurement using phase-measuring deflectometry.
(Image: Micro-Epsilon measurement technology)

According to the manufacturer, the 3D Reflectcontrol sensors can measure surfaces using phase-measuring deflectometry and deliver precise measurement results. Depending on the application, models are available for 2D and 3D evaluation.

Sensors analyze a stripe pattern

During analysis by the sensors, a stripe pattern is projected onto the surface and its reflection is recorded by two cameras. From the images, the sensor calculates a 3D point cloud of the surface structure, making irregularities, scratches and other defects visible.

The sensor can be integrated stationary or guided over the measurement object on the robot. Localized deviations or defects are evaluated and displayed in the CAD data.

The RCS130-160 3D HLP is specially optimized for measurement and inspection tasks in production lines and has a Gige-Vision interface. This enables it to deliver Genicam-compliant data, allowing seamless integration into existing image processing systems.

According to the company, the sensor delivers sharper 2D images than its predecessor model thanks to the improved camera arrangement, as well as a 3D representation of highly reflective surfaces. This allows the topology of components to be determined (e.g. flatness, deflection and curvature). The high z-resolution in the nanometer range and the excellent repeatability of < 1 micrometer ensure that the sensor outputs up to 5 million 3D data points.

The sensors can be used here

Sensors from the Reflectcontro series can be used in semiconductor production, for example, where they are designed to precisely detect the shape of a wafer: According to the manufacturer, even the smallest surface defects of less than 1 micrometer can be detected during the surface inspection of painted add-on parts.

According to Micro-Epsilon, the Reflectcontrol sensors can also be used together with their 3D-Inspect software. The software transfers the measurement data from the sensor to a PC via Ethernet and visualizes it in 3D. There, the data can be further processed, evaluated and assessed using 3D-Inspect. If required, it can also be logged and transmitted to a control unit. The 3D data can also be saved.

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Date: 08.12.2025

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